12/8/2011	9:34:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2011	9:34:39 AM	Recipe started at 9:34 AM
12/8/2011	9:34:39 AM	Helium valve closed
12/8/2011	9:34:39 AM	H2 valve closed
12/8/2011	9:34:39 AM	BCl3 valve closed
12/8/2011	9:34:39 AM	PH3 valve closed
12/8/2011	9:34:39 AM	SiCl4 pre valve closed
12/8/2011	9:34:39 AM	SiCl4 post valve closed
12/8/2011	9:34:39 AM	Main Vac valve closed
12/8/2011	9:34:39 AM	Bypass valve closed
12/8/2011	9:34:39 AM	Bubbler valve closed
12/8/2011	9:34:39 AM	Helium MFC set to  0.000000
12/8/2011	9:34:39 AM	H2 MFC set to  0.000000
12/8/2011	9:34:39 AM	BCl3 MFC set to  0.000000
12/8/2011	9:34:39 AM	PHl3 MFC set to  0.000000
12/8/2011	9:34:39 AM	SiCl4 MFC set to  0.000000
12/8/2011	9:34:39 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	9:34:39 AM	Tube furnace set to 0
12/8/2011	9:34:42 AM	H2 valve closed
12/8/2011	9:34:42 AM	BCl3 valve closed
12/8/2011	9:34:42 AM	PH3 valve closed
12/8/2011	9:34:42 AM	SiCl4 pre valve closed
12/8/2011	9:34:42 AM	SiCl4 post valve closed
12/8/2011	9:34:42 AM	Main Vac valve closed
12/8/2011	9:34:42 AM	Bypass valve closed
12/8/2011	9:34:42 AM	Bubbler valve closed
12/8/2011	9:34:42 AM	Helium valve opened
12/8/2011	9:34:42 AM	Helium MFC set to  500.000000
12/8/2011	9:34:42 AM	H2 MFC set to  0.000000
12/8/2011	9:34:42 AM	BCl3 MFC set to  0.000000
12/8/2011	9:34:42 AM	PHl3 MFC set to  0.000000
12/8/2011	9:34:42 AM	SiCl4 MFC set to  0.000000
12/8/2011	9:34:42 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	9:34:42 AM	Tube furnace set to 0
12/8/2011	9:35:47 AM	Helium valve closed
12/8/2011	9:35:47 AM	H2 valve closed
12/8/2011	9:35:47 AM	BCl3 valve closed
12/8/2011	9:35:47 AM	PH3 valve closed
12/8/2011	9:35:47 AM	SiCl4 pre valve closed
12/8/2011	9:35:47 AM	SiCl4 post valve closed
12/8/2011	9:35:47 AM	Main Vac valve closed
12/8/2011	9:35:47 AM	Bypass valve closed
12/8/2011	9:35:47 AM	Bubbler valve closed
12/8/2011	9:35:47 AM	Helium MFC set to  0.000000
12/8/2011	9:35:47 AM	H2 MFC set to  0.000000
12/8/2011	9:35:47 AM	BCl3 MFC set to  0.000000
12/8/2011	9:35:47 AM	PHl3 MFC set to  0.000000
12/8/2011	9:35:47 AM	SiCl4 MFC set to  0.000000
12/8/2011	9:35:47 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	9:35:47 AM	Tube furnace set to 0
12/8/2011	9:35:48 AM	Run finished at 9:35 AM
12/8/2011	9:35:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2011	9:38:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2011	9:38:45 AM	Recipe started at 9:38 AM
12/8/2011	9:38:45 AM	Helium valve closed
12/8/2011	9:38:45 AM	H2 valve closed
12/8/2011	9:38:45 AM	BCl3 valve closed
12/8/2011	9:38:45 AM	PH3 valve closed
12/8/2011	9:38:45 AM	SiCl4 pre valve closed
12/8/2011	9:38:45 AM	SiCl4 post valve closed
12/8/2011	9:38:45 AM	Main Vac valve closed
12/8/2011	9:38:45 AM	Bubbler valve closed
12/8/2011	9:38:45 AM	Bypass valve opened
12/8/2011	9:38:45 AM	Helium MFC set to  0.000000
12/8/2011	9:38:45 AM	H2 MFC set to  0.000000
12/8/2011	9:38:45 AM	BCl3 MFC set to  0.000000
12/8/2011	9:38:45 AM	PHl3 MFC set to  0.000000
12/8/2011	9:38:45 AM	SiCl4 MFC set to  0.000000
12/8/2011	9:38:45 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	9:38:45 AM	Tube furnace set to 0
12/8/2011	9:39:48 AM	Helium valve closed
12/8/2011	9:39:48 AM	H2 valve closed
12/8/2011	9:39:48 AM	BCl3 valve closed
12/8/2011	9:39:48 AM	PH3 valve closed
12/8/2011	9:39:48 AM	SiCl4 pre valve closed
12/8/2011	9:39:48 AM	SiCl4 post valve closed
12/8/2011	9:39:48 AM	Main Vac valve closed
12/8/2011	9:39:48 AM	Bubbler valve closed
12/8/2011	9:39:48 AM	Bypass valve opened
12/8/2011	9:39:48 AM	Helium MFC set to  0.000000
12/8/2011	9:39:48 AM	H2 MFC set to  0.000000
12/8/2011	9:39:48 AM	BCl3 MFC set to  0.000000
12/8/2011	9:39:48 AM	PHl3 MFC set to  0.000000
12/8/2011	9:39:48 AM	SiCl4 MFC set to  0.000000
12/8/2011	9:39:48 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	9:39:49 AM	Tube furnace set to 0
12/8/2011	9:40:49 AM	Helium valve closed
12/8/2011	9:40:49 AM	H2 valve closed
12/8/2011	9:40:49 AM	BCl3 valve closed
12/8/2011	9:40:49 AM	PH3 valve closed
12/8/2011	9:40:49 AM	SiCl4 pre valve closed
12/8/2011	9:40:49 AM	SiCl4 post valve closed
12/8/2011	9:40:49 AM	Bypass valve closed
12/8/2011	9:40:49 AM	Bubbler valve closed
12/8/2011	9:40:49 AM	Main Vac valve opened
12/8/2011	9:40:49 AM	Helium MFC set to  0.000000
12/8/2011	9:40:49 AM	H2 MFC set to  0.000000
12/8/2011	9:40:49 AM	BCl3 MFC set to  0.000000
12/8/2011	9:40:49 AM	PHl3 MFC set to  0.000000
12/8/2011	9:40:49 AM	SiCl4 MFC set to  0.000000
12/8/2011	9:40:49 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	9:40:49 AM	Tube furnace set to 0
12/8/2011	9:40:50 AM	Run finished at 9:40 AM
12/8/2011	9:40:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2011	10:41:57 AM	Main Vac valve closed
12/8/2011	10:42:13 AM	Main Vac valve opened
12/8/2011	10:42:29 AM	Recipe started at 10:42 AM
12/8/2011	10:42:29 AM	Helium valve closed
12/8/2011	10:42:29 AM	H2 valve closed
12/8/2011	10:42:29 AM	BCl3 valve closed
12/8/2011	10:42:29 AM	PH3 valve closed
12/8/2011	10:42:29 AM	SiCl4 pre valve closed
12/8/2011	10:42:29 AM	SiCl4 post valve closed
12/8/2011	10:42:29 AM	Main Vac valve closed
12/8/2011	10:42:29 AM	Bypass valve closed
12/8/2011	10:42:29 AM	Bubbler valve closed
12/8/2011	10:42:29 AM	Helium MFC set to  0.000000
12/8/2011	10:42:29 AM	H2 MFC set to  0.000000
12/8/2011	10:42:29 AM	BCl3 MFC set to  0.000000
12/8/2011	10:42:29 AM	PHl3 MFC set to  0.000000
12/8/2011	10:42:29 AM	SiCl4 MFC set to  0.000000
12/8/2011	10:42:29 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	10:42:29 AM	Tube furnace set to 0
12/8/2011	10:42:32 AM	Helium valve closed
12/8/2011	10:42:32 AM	BCl3 valve closed
12/8/2011	10:42:32 AM	PH3 valve closed
12/8/2011	10:42:32 AM	SiCl4 pre valve closed
12/8/2011	10:42:32 AM	SiCl4 post valve closed
12/8/2011	10:42:32 AM	Main Vac valve closed
12/8/2011	10:42:32 AM	Bypass valve closed
12/8/2011	10:42:32 AM	Bubbler valve closed
12/8/2011	10:42:32 AM	H2 valve opened
12/8/2011	10:42:32 AM	Helium MFC set to  0.000000
12/8/2011	10:42:32 AM	H2 MFC set to  500.000000
12/8/2011	10:42:32 AM	BCl3 MFC set to  0.000000
12/8/2011	10:42:32 AM	PHl3 MFC set to  0.000000
12/8/2011	10:42:32 AM	SiCl4 MFC set to  0.000000
12/8/2011	10:42:32 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	10:42:32 AM	Tube furnace set to 50
12/8/2011	10:43:40 AM	Helium valve closed
12/8/2011	10:43:40 AM	BCl3 valve closed
12/8/2011	10:43:40 AM	PH3 valve closed
12/8/2011	10:43:40 AM	SiCl4 pre valve closed
12/8/2011	10:43:40 AM	SiCl4 post valve closed
12/8/2011	10:43:40 AM	Main Vac valve closed
12/8/2011	10:43:40 AM	Bypass valve closed
12/8/2011	10:43:40 AM	H2 valve opened
12/8/2011	10:43:40 AM	Bubbler valve opened
12/8/2011	10:43:40 AM	Helium MFC set to  0.000000
12/8/2011	10:43:40 AM	H2 MFC set to  500.000000
12/8/2011	10:43:40 AM	BCl3 MFC set to  0.000000
12/8/2011	10:43:40 AM	PHl3 MFC set to  0.000000
12/8/2011	10:43:40 AM	SiCl4 MFC set to  0.000000
12/8/2011	10:43:40 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	10:43:40 AM	Tube furnace set to 50
12/8/2011	10:43:41 AM	Helium valve closed
12/8/2011	10:43:41 AM	BCl3 valve closed
12/8/2011	10:43:41 AM	PH3 valve closed
12/8/2011	10:43:41 AM	SiCl4 pre valve closed
12/8/2011	10:43:41 AM	SiCl4 post valve closed
12/8/2011	10:43:41 AM	Main Vac valve closed
12/8/2011	10:43:41 AM	Bypass valve closed
12/8/2011	10:43:41 AM	H2 valve opened
12/8/2011	10:43:41 AM	Bubbler valve opened
12/8/2011	10:43:41 AM	Helium MFC set to  0.000000
12/8/2011	10:43:41 AM	H2 MFC set to  500.000000
12/8/2011	10:43:41 AM	BCl3 MFC set to  0.000000
12/8/2011	10:43:41 AM	PHl3 MFC set to  0.000000
12/8/2011	10:43:41 AM	SiCl4 MFC set to  0.000000
12/8/2011	10:43:41 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	10:43:42 AM	Tube furnace set to 1000
12/8/2011	11:06:42 AM	Helium valve closed
12/8/2011	11:06:42 AM	BCl3 valve closed
12/8/2011	11:06:42 AM	Main Vac valve closed
12/8/2011	11:06:42 AM	Bypass valve closed
12/8/2011	11:06:42 AM	H2 valve opened
12/8/2011	11:06:42 AM	PH3 valve opened
12/8/2011	11:06:42 AM	SiCl4 pre valve opened
12/8/2011	11:06:42 AM	SiCl4 post valve opened
12/8/2011	11:06:42 AM	Bubbler valve opened
12/8/2011	11:06:42 AM	Helium MFC set to  0.000000
12/8/2011	11:06:42 AM	H2 MFC set to  495.000000
12/8/2011	11:06:42 AM	BCl3 MFC set to  0.000000
12/8/2011	11:06:42 AM	PHl3 MFC set to  1.000000
12/8/2011	11:06:42 AM	SiCl4 MFC set to  25.000000
12/8/2011	11:06:42 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:06:42 AM	Tube furnace set to 1000
12/8/2011	11:26:42 AM	Helium valve closed
12/8/2011	11:26:42 AM	BCl3 valve closed
12/8/2011	11:26:42 AM	PH3 valve closed
12/8/2011	11:26:42 AM	SiCl4 pre valve closed
12/8/2011	11:26:42 AM	SiCl4 post valve closed
12/8/2011	11:26:42 AM	Main Vac valve closed
12/8/2011	11:26:42 AM	Bypass valve closed
12/8/2011	11:26:42 AM	H2 valve opened
12/8/2011	11:26:42 AM	Bubbler valve opened
12/8/2011	11:26:42 AM	Helium MFC set to  0.000000
12/8/2011	11:26:42 AM	H2 MFC set to  480.000000
12/8/2011	11:26:42 AM	BCl3 MFC set to  0.000000
12/8/2011	11:26:42 AM	PHl3 MFC set to  0.000000
12/8/2011	11:26:42 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:26:42 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:26:42 AM	Tube furnace set to 750
12/8/2011	11:36:42 AM	H2 valve closed
12/8/2011	11:36:42 AM	BCl3 valve closed
12/8/2011	11:36:42 AM	PH3 valve closed
12/8/2011	11:36:42 AM	SiCl4 pre valve closed
12/8/2011	11:36:42 AM	SiCl4 post valve closed
12/8/2011	11:36:42 AM	Main Vac valve closed
12/8/2011	11:36:42 AM	Bypass valve closed
12/8/2011	11:36:42 AM	Helium valve opened
12/8/2011	11:36:42 AM	Bubbler valve opened
12/8/2011	11:36:42 AM	Helium MFC set to  400.000000
12/8/2011	11:36:42 AM	H2 MFC set to  0.000000
12/8/2011	11:36:42 AM	BCl3 MFC set to  0.000000
12/8/2011	11:36:42 AM	PHl3 MFC set to  0.000000
12/8/2011	11:36:42 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:36:42 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:36:42 AM	Tube furnace set to 0
12/8/2011	11:49:22 AM	Run aborted at 11:49 AM
12/8/2011	11:49:22 AM	Helium valve closed
12/8/2011	11:49:22 AM	H2 valve closed
12/8/2011	11:49:22 AM	BCl3 valve closed
12/8/2011	11:49:22 AM	PH3 valve closed
12/8/2011	11:49:22 AM	SiCl4 pre valve closed
12/8/2011	11:49:22 AM	SiCl4 post valve closed
12/8/2011	11:49:22 AM	Bypass valve closed
12/8/2011	11:49:22 AM	Main Vac valve closed
12/8/2011	11:49:22 AM	Bubbler valve closed
12/8/2011	11:49:22 AM	Helium MFC set to  0.000000
12/8/2011	11:49:22 AM	H2 MFC set to  0.000000
12/8/2011	11:49:22 AM	BCl3 MFC set to  0.000000
12/8/2011	11:49:22 AM	PHl3 MFC set to  0.000000
12/8/2011	11:49:22 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:49:22 AM	Tube furnace set to 0
12/8/2011	11:52:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2011	11:52:30 AM	Recipe started at 11:52 AM
12/8/2011	11:52:30 AM	Helium valve closed
12/8/2011	11:52:30 AM	H2 valve closed
12/8/2011	11:52:30 AM	BCl3 valve closed
12/8/2011	11:52:30 AM	PH3 valve closed
12/8/2011	11:52:30 AM	SiCl4 pre valve closed
12/8/2011	11:52:30 AM	SiCl4 post valve closed
12/8/2011	11:52:30 AM	Main Vac valve closed
12/8/2011	11:52:30 AM	Bubbler valve closed
12/8/2011	11:52:30 AM	Bypass valve opened
12/8/2011	11:52:30 AM	Helium MFC set to  0.000000
12/8/2011	11:52:30 AM	H2 MFC set to  0.000000
12/8/2011	11:52:30 AM	BCl3 MFC set to  0.000000
12/8/2011	11:52:30 AM	PHl3 MFC set to  0.000000
12/8/2011	11:52:30 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:52:30 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:52:30 AM	Tube furnace set to 0
12/8/2011	11:53:29 AM	Helium valve closed
12/8/2011	11:53:29 AM	H2 valve closed
12/8/2011	11:53:29 AM	BCl3 valve closed
12/8/2011	11:53:29 AM	PH3 valve closed
12/8/2011	11:53:29 AM	SiCl4 pre valve closed
12/8/2011	11:53:29 AM	SiCl4 post valve closed
12/8/2011	11:53:29 AM	Main Vac valve closed
12/8/2011	11:53:29 AM	Bubbler valve closed
12/8/2011	11:53:29 AM	Bypass valve opened
12/8/2011	11:53:29 AM	Helium MFC set to  0.000000
12/8/2011	11:53:29 AM	H2 MFC set to  0.000000
12/8/2011	11:53:29 AM	BCl3 MFC set to  0.000000
12/8/2011	11:53:29 AM	PHl3 MFC set to  0.000000
12/8/2011	11:53:29 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:53:29 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:53:29 AM	Tube furnace set to 0
12/8/2011	11:53:58 AM	Helium valve closed
12/8/2011	11:53:58 AM	H2 valve closed
12/8/2011	11:53:58 AM	BCl3 valve closed
12/8/2011	11:53:58 AM	PH3 valve closed
12/8/2011	11:53:58 AM	SiCl4 pre valve closed
12/8/2011	11:53:58 AM	SiCl4 post valve closed
12/8/2011	11:53:58 AM	Bypass valve closed
12/8/2011	11:53:58 AM	Bubbler valve closed
12/8/2011	11:53:58 AM	Main Vac valve opened
12/8/2011	11:53:58 AM	Helium MFC set to  0.000000
12/8/2011	11:53:58 AM	H2 MFC set to  0.000000
12/8/2011	11:53:58 AM	BCl3 MFC set to  0.000000
12/8/2011	11:53:58 AM	PHl3 MFC set to  0.000000
12/8/2011	11:53:58 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:53:58 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:53:59 AM	Tube furnace set to 0
12/8/2011	11:54:00 AM	Run finished at 11:54 AM
12/8/2011	11:54:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2011	11:54:54 AM	Helium MFC set to  20.000000
12/8/2011	11:54:56 AM	Helium valve opened
12/8/2011	11:55:09 AM	Helium valve closed
12/8/2011	11:55:26 AM	Helium valve opened
12/8/2011	11:55:59 AM	Helium valve closed
12/8/2011	11:56:18 AM	Helium valve opened
12/8/2011	11:56:44 AM	Helium valve closed
12/8/2011	11:57:03 AM	Recipe started at 11:57 AM
12/8/2011	11:57:03 AM	Helium valve closed
12/8/2011	11:57:03 AM	H2 valve closed
12/8/2011	11:57:03 AM	BCl3 valve closed
12/8/2011	11:57:03 AM	PH3 valve closed
12/8/2011	11:57:03 AM	SiCl4 pre valve closed
12/8/2011	11:57:03 AM	SiCl4 post valve closed
12/8/2011	11:57:03 AM	Bypass valve closed
12/8/2011	11:57:03 AM	Bubbler valve closed
12/8/2011	11:57:03 AM	Main Vac valve opened
12/8/2011	11:57:03 AM	Helium MFC set to  0.000000
12/8/2011	11:57:03 AM	H2 MFC set to  0.000000
12/8/2011	11:57:03 AM	BCl3 MFC set to  0.000000
12/8/2011	11:57:03 AM	PHl3 MFC set to  0.000000
12/8/2011	11:57:03 AM	SiCl4 MFC set to  0.000000
12/8/2011	11:57:03 AM	Bypass solenoid MFC set to  0.000000
12/8/2011	11:57:03 AM	Tube furnace set to 0
12/8/2011	12:48:10 PM	Run aborted at 12:48 PM
12/8/2011	12:48:10 PM	Helium valve closed
12/8/2011	12:48:10 PM	H2 valve closed
12/8/2011	12:48:10 PM	BCl3 valve closed
12/8/2011	12:48:10 PM	PH3 valve closed
12/8/2011	12:48:10 PM	SiCl4 pre valve closed
12/8/2011	12:48:10 PM	SiCl4 post valve closed
12/8/2011	12:48:10 PM	Bypass valve closed
12/8/2011	12:48:10 PM	Main Vac valve closed
12/8/2011	12:48:10 PM	Bubbler valve closed
12/8/2011	12:48:10 PM	Helium MFC set to  0.000000
12/8/2011	12:48:10 PM	H2 MFC set to  0.000000
12/8/2011	12:48:10 PM	BCl3 MFC set to  0.000000
12/8/2011	12:48:10 PM	PHl3 MFC set to  0.000000
12/8/2011	12:48:10 PM	SiCl4 MFC set to  0.000000
12/8/2011	12:48:10 PM	Tube furnace set to 0
12/8/2011	12:48:22 PM	Recipe started at 12:48 PM
12/8/2011	12:48:22 PM	Helium valve closed
12/8/2011	12:48:22 PM	H2 valve closed
12/8/2011	12:48:22 PM	BCl3 valve closed
12/8/2011	12:48:22 PM	PH3 valve closed
12/8/2011	12:48:22 PM	SiCl4 pre valve closed
12/8/2011	12:48:22 PM	SiCl4 post valve closed
12/8/2011	12:48:22 PM	Bypass valve closed
12/8/2011	12:48:22 PM	Bubbler valve closed
12/8/2011	12:48:22 PM	Main Vac valve opened
12/8/2011	12:48:22 PM	Helium MFC set to  0.000000
12/8/2011	12:48:22 PM	H2 MFC set to  0.000000
12/8/2011	12:48:22 PM	BCl3 MFC set to  0.000000
12/8/2011	12:48:22 PM	PHl3 MFC set to  0.000000
12/8/2011	12:48:22 PM	SiCl4 MFC set to  0.000000
12/8/2011	12:48:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	12:48:22 PM	Tube furnace set to 0
12/8/2011	12:48:25 PM	Helium valve closed
12/8/2011	12:48:25 PM	H2 valve closed
12/8/2011	12:48:25 PM	BCl3 valve closed
12/8/2011	12:48:25 PM	PH3 valve closed
12/8/2011	12:48:25 PM	SiCl4 pre valve closed
12/8/2011	12:48:25 PM	SiCl4 post valve closed
12/8/2011	12:48:25 PM	Main Vac valve closed
12/8/2011	12:48:25 PM	Bypass valve closed
12/8/2011	12:48:25 PM	Bubbler valve closed
12/8/2011	12:48:25 PM	Helium MFC set to  0.000000
12/8/2011	12:48:25 PM	H2 MFC set to  0.000000
12/8/2011	12:48:25 PM	BCl3 MFC set to  0.000000
12/8/2011	12:48:25 PM	PHl3 MFC set to  0.000000
12/8/2011	12:48:25 PM	SiCl4 MFC set to  0.000000
12/8/2011	12:48:25 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	12:48:25 PM	Tube furnace set to 0
12/8/2011	12:48:28 PM	Helium valve closed
12/8/2011	12:48:28 PM	BCl3 valve closed
12/8/2011	12:48:28 PM	PH3 valve closed
12/8/2011	12:48:28 PM	SiCl4 pre valve closed
12/8/2011	12:48:28 PM	SiCl4 post valve closed
12/8/2011	12:48:28 PM	Main Vac valve closed
12/8/2011	12:48:28 PM	Bypass valve closed
12/8/2011	12:48:28 PM	Bubbler valve closed
12/8/2011	12:48:28 PM	H2 valve opened
12/8/2011	12:48:28 PM	Helium MFC set to  0.000000
12/8/2011	12:48:28 PM	H2 MFC set to  500.000000
12/8/2011	12:48:28 PM	BCl3 MFC set to  0.000000
12/8/2011	12:48:28 PM	PHl3 MFC set to  0.000000
12/8/2011	12:48:28 PM	SiCl4 MFC set to  0.000000
12/8/2011	12:48:28 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	12:48:28 PM	Tube furnace set to 50
12/8/2011	12:49:31 PM	Helium valve closed
12/8/2011	12:49:31 PM	BCl3 valve closed
12/8/2011	12:49:31 PM	PH3 valve closed
12/8/2011	12:49:31 PM	SiCl4 pre valve closed
12/8/2011	12:49:31 PM	SiCl4 post valve closed
12/8/2011	12:49:31 PM	Main Vac valve closed
12/8/2011	12:49:31 PM	Bypass valve closed
12/8/2011	12:49:31 PM	H2 valve opened
12/8/2011	12:49:31 PM	Bubbler valve opened
12/8/2011	12:49:31 PM	Helium MFC set to  0.000000
12/8/2011	12:49:31 PM	H2 MFC set to  500.000000
12/8/2011	12:49:31 PM	BCl3 MFC set to  0.000000
12/8/2011	12:49:31 PM	PHl3 MFC set to  0.000000
12/8/2011	12:49:31 PM	SiCl4 MFC set to  0.000000
12/8/2011	12:49:31 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	12:49:32 PM	Tube furnace set to 50
12/8/2011	12:49:33 PM	Helium valve closed
12/8/2011	12:49:33 PM	BCl3 valve closed
12/8/2011	12:49:33 PM	PH3 valve closed
12/8/2011	12:49:33 PM	SiCl4 pre valve closed
12/8/2011	12:49:33 PM	SiCl4 post valve closed
12/8/2011	12:49:33 PM	Main Vac valve closed
12/8/2011	12:49:33 PM	Bypass valve closed
12/8/2011	12:49:33 PM	H2 valve opened
12/8/2011	12:49:33 PM	Bubbler valve opened
12/8/2011	12:49:33 PM	Helium MFC set to  0.000000
12/8/2011	12:49:33 PM	H2 MFC set to  500.000000
12/8/2011	12:49:33 PM	BCl3 MFC set to  0.000000
12/8/2011	12:49:33 PM	PHl3 MFC set to  0.000000
12/8/2011	12:49:33 PM	SiCl4 MFC set to  0.000000
12/8/2011	12:49:33 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	12:49:33 PM	Tube furnace set to 1000
12/8/2011	1:12:33 PM	Helium valve closed
12/8/2011	1:12:33 PM	BCl3 valve closed
12/8/2011	1:12:33 PM	Main Vac valve closed
12/8/2011	1:12:33 PM	Bypass valve closed
12/8/2011	1:12:33 PM	H2 valve opened
12/8/2011	1:12:33 PM	PH3 valve opened
12/8/2011	1:12:33 PM	SiCl4 pre valve opened
12/8/2011	1:12:33 PM	SiCl4 post valve opened
12/8/2011	1:12:33 PM	Bubbler valve opened
12/8/2011	1:12:33 PM	Helium MFC set to  0.000000
12/8/2011	1:12:33 PM	H2 MFC set to  495.000000
12/8/2011	1:12:33 PM	BCl3 MFC set to  0.000000
12/8/2011	1:12:33 PM	PHl3 MFC set to  1.000000
12/8/2011	1:12:33 PM	SiCl4 MFC set to  30.000000
12/8/2011	1:12:33 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	1:12:33 PM	Tube furnace set to 1000
12/8/2011	1:32:33 PM	Helium valve closed
12/8/2011	1:32:33 PM	BCl3 valve closed
12/8/2011	1:32:33 PM	PH3 valve closed
12/8/2011	1:32:33 PM	SiCl4 pre valve closed
12/8/2011	1:32:33 PM	SiCl4 post valve closed
12/8/2011	1:32:33 PM	Main Vac valve closed
12/8/2011	1:32:33 PM	Bypass valve closed
12/8/2011	1:32:33 PM	H2 valve opened
12/8/2011	1:32:33 PM	Bubbler valve opened
12/8/2011	1:32:33 PM	Helium MFC set to  0.000000
12/8/2011	1:32:33 PM	H2 MFC set to  480.000000
12/8/2011	1:32:33 PM	BCl3 MFC set to  0.000000
12/8/2011	1:32:33 PM	PHl3 MFC set to  0.000000
12/8/2011	1:32:33 PM	SiCl4 MFC set to  0.000000
12/8/2011	1:32:33 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	1:32:33 PM	Tube furnace set to 750
12/8/2011	1:42:33 PM	H2 valve closed
12/8/2011	1:42:33 PM	BCl3 valve closed
12/8/2011	1:42:33 PM	PH3 valve closed
12/8/2011	1:42:33 PM	SiCl4 pre valve closed
12/8/2011	1:42:33 PM	SiCl4 post valve closed
12/8/2011	1:42:33 PM	Main Vac valve closed
12/8/2011	1:42:33 PM	Bypass valve closed
12/8/2011	1:42:33 PM	Helium valve opened
12/8/2011	1:42:33 PM	Bubbler valve opened
12/8/2011	1:42:33 PM	Helium MFC set to  400.000000
12/8/2011	1:42:33 PM	H2 MFC set to  0.000000
12/8/2011	1:42:33 PM	BCl3 MFC set to  0.000000
12/8/2011	1:42:33 PM	PHl3 MFC set to  0.000000
12/8/2011	1:42:33 PM	SiCl4 MFC set to  0.000000
12/8/2011	1:42:33 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	1:42:33 PM	Tube furnace set to 0
12/8/2011	1:59:28 PM	Run aborted at 1:59 PM
12/8/2011	1:59:28 PM	Helium valve closed
12/8/2011	1:59:28 PM	H2 valve closed
12/8/2011	1:59:28 PM	BCl3 valve closed
12/8/2011	1:59:28 PM	PH3 valve closed
12/8/2011	1:59:28 PM	SiCl4 pre valve closed
12/8/2011	1:59:28 PM	SiCl4 post valve closed
12/8/2011	1:59:28 PM	Bypass valve closed
12/8/2011	1:59:28 PM	Main Vac valve closed
12/8/2011	1:59:28 PM	Bubbler valve closed
12/8/2011	1:59:28 PM	Helium MFC set to  0.000000
12/8/2011	1:59:28 PM	H2 MFC set to  0.000000
12/8/2011	1:59:28 PM	BCl3 MFC set to  0.000000
12/8/2011	1:59:28 PM	PHl3 MFC set to  0.000000
12/8/2011	1:59:28 PM	SiCl4 MFC set to  0.000000
12/8/2011	1:59:28 PM	Tube furnace set to 0
12/8/2011	2:04:39 PM	Bypass valve opened
12/8/2011	2:05:47 PM	Bypass valve closed
12/8/2011	2:05:47 PM	Main Vac valve opened
12/8/2011	2:13:55 PM	Recipe started at 2:13 PM
12/8/2011	2:13:55 PM	Helium valve closed
12/8/2011	2:13:55 PM	H2 valve closed
12/8/2011	2:13:55 PM	BCl3 valve closed
12/8/2011	2:13:55 PM	PH3 valve closed
12/8/2011	2:13:55 PM	SiCl4 pre valve closed
12/8/2011	2:13:55 PM	SiCl4 post valve closed
12/8/2011	2:13:55 PM	Bypass valve closed
12/8/2011	2:13:55 PM	Bubbler valve closed
12/8/2011	2:13:55 PM	Main Vac valve opened
12/8/2011	2:13:55 PM	Helium MFC set to  0.000000
12/8/2011	2:13:55 PM	H2 MFC set to  0.000000
12/8/2011	2:13:55 PM	BCl3 MFC set to  0.000000
12/8/2011	2:13:55 PM	PHl3 MFC set to  0.000000
12/8/2011	2:13:55 PM	SiCl4 MFC set to  0.000000
12/8/2011	2:13:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	2:13:55 PM	Tube furnace set to 0
12/8/2011	3:13:56 PM	Helium valve closed
12/8/2011	3:13:56 PM	H2 valve closed
12/8/2011	3:13:56 PM	BCl3 valve closed
12/8/2011	3:13:56 PM	PH3 valve closed
12/8/2011	3:13:56 PM	SiCl4 pre valve closed
12/8/2011	3:13:56 PM	SiCl4 post valve closed
12/8/2011	3:13:56 PM	Main Vac valve closed
12/8/2011	3:13:56 PM	Bypass valve closed
12/8/2011	3:13:56 PM	Bubbler valve closed
12/8/2011	3:13:56 PM	Helium MFC set to  0.000000
12/8/2011	3:13:56 PM	H2 MFC set to  0.000000
12/8/2011	3:13:56 PM	BCl3 MFC set to  0.000000
12/8/2011	3:13:56 PM	PHl3 MFC set to  0.000000
12/8/2011	3:13:56 PM	SiCl4 MFC set to  0.000000
12/8/2011	3:13:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	3:13:56 PM	Tube furnace set to 0
12/8/2011	3:13:59 PM	Helium valve closed
12/8/2011	3:13:59 PM	BCl3 valve closed
12/8/2011	3:13:59 PM	PH3 valve closed
12/8/2011	3:13:59 PM	SiCl4 pre valve closed
12/8/2011	3:13:59 PM	SiCl4 post valve closed
12/8/2011	3:13:59 PM	Main Vac valve closed
12/8/2011	3:13:59 PM	Bypass valve closed
12/8/2011	3:13:59 PM	Bubbler valve closed
12/8/2011	3:13:59 PM	H2 valve opened
12/8/2011	3:13:59 PM	Helium MFC set to  0.000000
12/8/2011	3:13:59 PM	H2 MFC set to  500.000000
12/8/2011	3:13:59 PM	BCl3 MFC set to  0.000000
12/8/2011	3:13:59 PM	PHl3 MFC set to  0.000000
12/8/2011	3:13:59 PM	SiCl4 MFC set to  0.000000
12/8/2011	3:13:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	3:13:59 PM	Tube furnace set to 50
12/8/2011	3:15:03 PM	Helium valve closed
12/8/2011	3:15:03 PM	BCl3 valve closed
12/8/2011	3:15:03 PM	PH3 valve closed
12/8/2011	3:15:03 PM	SiCl4 pre valve closed
12/8/2011	3:15:03 PM	SiCl4 post valve closed
12/8/2011	3:15:03 PM	Main Vac valve closed
12/8/2011	3:15:03 PM	Bypass valve closed
12/8/2011	3:15:03 PM	H2 valve opened
12/8/2011	3:15:03 PM	Bubbler valve opened
12/8/2011	3:15:03 PM	Helium MFC set to  0.000000
12/8/2011	3:15:03 PM	H2 MFC set to  500.000000
12/8/2011	3:15:03 PM	BCl3 MFC set to  0.000000
12/8/2011	3:15:03 PM	PHl3 MFC set to  0.000000
12/8/2011	3:15:03 PM	SiCl4 MFC set to  0.000000
12/8/2011	3:15:03 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	3:15:04 PM	Tube furnace set to 50
12/8/2011	3:15:05 PM	Helium valve closed
12/8/2011	3:15:05 PM	BCl3 valve closed
12/8/2011	3:15:05 PM	PH3 valve closed
12/8/2011	3:15:05 PM	SiCl4 pre valve closed
12/8/2011	3:15:05 PM	SiCl4 post valve closed
12/8/2011	3:15:05 PM	Main Vac valve closed
12/8/2011	3:15:05 PM	Bypass valve closed
12/8/2011	3:15:05 PM	H2 valve opened
12/8/2011	3:15:05 PM	Bubbler valve opened
12/8/2011	3:15:05 PM	Helium MFC set to  0.000000
12/8/2011	3:15:05 PM	H2 MFC set to  500.000000
12/8/2011	3:15:05 PM	BCl3 MFC set to  0.000000
12/8/2011	3:15:05 PM	PHl3 MFC set to  0.000000
12/8/2011	3:15:05 PM	SiCl4 MFC set to  0.000000
12/8/2011	3:15:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	3:15:05 PM	Tube furnace set to 1000
12/8/2011	3:38:05 PM	Helium valve closed
12/8/2011	3:38:05 PM	BCl3 valve closed
12/8/2011	3:38:05 PM	Main Vac valve closed
12/8/2011	3:38:05 PM	Bypass valve closed
12/8/2011	3:38:05 PM	H2 valve opened
12/8/2011	3:38:05 PM	PH3 valve opened
12/8/2011	3:38:05 PM	SiCl4 pre valve opened
12/8/2011	3:38:05 PM	SiCl4 post valve opened
12/8/2011	3:38:05 PM	Bubbler valve opened
12/8/2011	3:38:05 PM	Helium MFC set to  0.000000
12/8/2011	3:38:05 PM	H2 MFC set to  495.000000
12/8/2011	3:38:05 PM	BCl3 MFC set to  0.000000
12/8/2011	3:38:05 PM	PHl3 MFC set to  1.000000
12/8/2011	3:38:05 PM	SiCl4 MFC set to  30.000000
12/8/2011	3:38:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	3:38:05 PM	Tube furnace set to 1000
12/8/2011	3:58:05 PM	Helium valve closed
12/8/2011	3:58:05 PM	BCl3 valve closed
12/8/2011	3:58:05 PM	PH3 valve closed
12/8/2011	3:58:05 PM	SiCl4 pre valve closed
12/8/2011	3:58:05 PM	SiCl4 post valve closed
12/8/2011	3:58:05 PM	Main Vac valve closed
12/8/2011	3:58:05 PM	Bypass valve closed
12/8/2011	3:58:05 PM	H2 valve opened
12/8/2011	3:58:05 PM	Bubbler valve opened
12/8/2011	3:58:05 PM	Helium MFC set to  0.000000
12/8/2011	3:58:05 PM	H2 MFC set to  480.000000
12/8/2011	3:58:05 PM	BCl3 MFC set to  0.000000
12/8/2011	3:58:05 PM	PHl3 MFC set to  0.000000
12/8/2011	3:58:05 PM	SiCl4 MFC set to  0.000000
12/8/2011	3:58:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	3:58:05 PM	Tube furnace set to 750
12/8/2011	4:08:05 PM	H2 valve closed
12/8/2011	4:08:05 PM	BCl3 valve closed
12/8/2011	4:08:05 PM	PH3 valve closed
12/8/2011	4:08:05 PM	SiCl4 pre valve closed
12/8/2011	4:08:05 PM	SiCl4 post valve closed
12/8/2011	4:08:05 PM	Main Vac valve closed
12/8/2011	4:08:05 PM	Bypass valve closed
12/8/2011	4:08:05 PM	Helium valve opened
12/8/2011	4:08:05 PM	Bubbler valve opened
12/8/2011	4:08:05 PM	Helium MFC set to  400.000000
12/8/2011	4:08:05 PM	H2 MFC set to  0.000000
12/8/2011	4:08:05 PM	BCl3 MFC set to  0.000000
12/8/2011	4:08:05 PM	PHl3 MFC set to  0.000000
12/8/2011	4:08:05 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:08:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:08:05 PM	Tube furnace set to 0
12/8/2011	4:33:05 PM	Helium valve closed
12/8/2011	4:33:05 PM	H2 valve closed
12/8/2011	4:33:05 PM	BCl3 valve closed
12/8/2011	4:33:05 PM	PH3 valve closed
12/8/2011	4:33:05 PM	SiCl4 pre valve closed
12/8/2011	4:33:05 PM	SiCl4 post valve closed
12/8/2011	4:33:05 PM	Main Vac valve closed
12/8/2011	4:33:05 PM	Bypass valve closed
12/8/2011	4:33:05 PM	Bubbler valve closed
12/8/2011	4:33:05 PM	Helium MFC set to  0.000000
12/8/2011	4:33:05 PM	H2 MFC set to  0.000000
12/8/2011	4:33:05 PM	BCl3 MFC set to  0.000000
12/8/2011	4:33:05 PM	PHl3 MFC set to  0.000000
12/8/2011	4:33:05 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:33:05 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:33:05 PM	Tube furnace set to 50
12/8/2011	4:38:05 PM	Helium valve closed
12/8/2011	4:38:05 PM	H2 valve closed
12/8/2011	4:38:05 PM	BCl3 valve closed
12/8/2011	4:38:05 PM	PH3 valve closed
12/8/2011	4:38:05 PM	SiCl4 pre valve closed
12/8/2011	4:38:05 PM	SiCl4 post valve closed
12/8/2011	4:38:05 PM	Main Vac valve closed
12/8/2011	4:38:05 PM	Bubbler valve closed
12/8/2011	4:38:05 PM	Bypass valve opened
12/8/2011	4:38:05 PM	Helium MFC set to  0.000000
12/8/2011	4:38:05 PM	H2 MFC set to  0.000000
12/8/2011	4:38:06 PM	BCl3 MFC set to  0.000000
12/8/2011	4:38:06 PM	PHl3 MFC set to  0.000000
12/8/2011	4:38:06 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:38:06 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:38:06 PM	Tube furnace set to 0
12/8/2011	4:43:06 PM	Helium valve closed
12/8/2011	4:43:06 PM	H2 valve closed
12/8/2011	4:43:06 PM	BCl3 valve closed
12/8/2011	4:43:06 PM	PH3 valve closed
12/8/2011	4:43:06 PM	SiCl4 pre valve closed
12/8/2011	4:43:06 PM	SiCl4 post valve closed
12/8/2011	4:43:06 PM	Bypass valve closed
12/8/2011	4:43:06 PM	Bubbler valve closed
12/8/2011	4:43:06 PM	Main Vac valve opened
12/8/2011	4:43:06 PM	Helium MFC set to  0.000000
12/8/2011	4:43:06 PM	H2 MFC set to  0.000000
12/8/2011	4:43:06 PM	BCl3 MFC set to  0.000000
12/8/2011	4:43:06 PM	PHl3 MFC set to  0.000000
12/8/2011	4:43:06 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:43:06 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:43:06 PM	Tube furnace set to 0
12/8/2011	4:43:07 PM	Run finished at 4:43 PM
12/8/2011	4:51:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2011	4:51:21 PM	Recipe started at 4:51 PM
12/8/2011	4:51:21 PM	Helium valve closed
12/8/2011	4:51:21 PM	H2 valve closed
12/8/2011	4:51:21 PM	BCl3 valve closed
12/8/2011	4:51:21 PM	PH3 valve closed
12/8/2011	4:51:21 PM	SiCl4 pre valve closed
12/8/2011	4:51:21 PM	SiCl4 post valve closed
12/8/2011	4:51:21 PM	Main Vac valve closed
12/8/2011	4:51:21 PM	Bypass valve closed
12/8/2011	4:51:21 PM	Bubbler valve closed
12/8/2011	4:51:21 PM	Helium MFC set to  0.000000
12/8/2011	4:51:21 PM	H2 MFC set to  0.000000
12/8/2011	4:51:21 PM	BCl3 MFC set to  0.000000
12/8/2011	4:51:21 PM	PHl3 MFC set to  0.000000
12/8/2011	4:51:21 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:51:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:51:21 PM	Tube furnace set to 0
12/8/2011	4:51:24 PM	H2 valve closed
12/8/2011	4:51:24 PM	BCl3 valve closed
12/8/2011	4:51:24 PM	PH3 valve closed
12/8/2011	4:51:24 PM	SiCl4 pre valve closed
12/8/2011	4:51:24 PM	SiCl4 post valve closed
12/8/2011	4:51:24 PM	Main Vac valve closed
12/8/2011	4:51:24 PM	Bypass valve closed
12/8/2011	4:51:24 PM	Bubbler valve closed
12/8/2011	4:51:24 PM	Helium valve opened
12/8/2011	4:51:24 PM	Helium MFC set to  500.000000
12/8/2011	4:51:24 PM	H2 MFC set to  0.000000
12/8/2011	4:51:24 PM	BCl3 MFC set to  0.000000
12/8/2011	4:51:24 PM	PHl3 MFC set to  0.000000
12/8/2011	4:51:24 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:51:24 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:51:24 PM	Tube furnace set to 0
12/8/2011	4:52:21 PM	Helium valve closed
12/8/2011	4:52:21 PM	H2 valve closed
12/8/2011	4:52:21 PM	BCl3 valve closed
12/8/2011	4:52:21 PM	PH3 valve closed
12/8/2011	4:52:21 PM	SiCl4 pre valve closed
12/8/2011	4:52:21 PM	SiCl4 post valve closed
12/8/2011	4:52:21 PM	Main Vac valve closed
12/8/2011	4:52:21 PM	Bypass valve closed
12/8/2011	4:52:21 PM	Bubbler valve closed
12/8/2011	4:52:21 PM	Helium MFC set to  0.000000
12/8/2011	4:52:21 PM	H2 MFC set to  0.000000
12/8/2011	4:52:21 PM	BCl3 MFC set to  0.000000
12/8/2011	4:52:21 PM	PHl3 MFC set to  0.000000
12/8/2011	4:52:21 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:52:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:52:21 PM	Tube furnace set to 0
12/8/2011	4:52:22 PM	Run finished at 4:52 PM
12/8/2011	4:52:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2011	4:55:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2011	4:55:15 PM	Recipe started at 4:55 PM
12/8/2011	4:55:15 PM	Helium valve closed
12/8/2011	4:55:15 PM	H2 valve closed
12/8/2011	4:55:15 PM	BCl3 valve closed
12/8/2011	4:55:15 PM	PH3 valve closed
12/8/2011	4:55:15 PM	SiCl4 pre valve closed
12/8/2011	4:55:15 PM	SiCl4 post valve closed
12/8/2011	4:55:15 PM	Main Vac valve closed
12/8/2011	4:55:15 PM	Bubbler valve closed
12/8/2011	4:55:15 PM	Bypass valve opened
12/8/2011	4:55:15 PM	Helium MFC set to  0.000000
12/8/2011	4:55:15 PM	H2 MFC set to  0.000000
12/8/2011	4:55:15 PM	BCl3 MFC set to  0.000000
12/8/2011	4:55:15 PM	PHl3 MFC set to  0.000000
12/8/2011	4:55:15 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:55:15 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:55:15 PM	Tube furnace set to 0
12/8/2011	4:56:14 PM	Helium valve closed
12/8/2011	4:56:14 PM	H2 valve closed
12/8/2011	4:56:14 PM	BCl3 valve closed
12/8/2011	4:56:14 PM	PH3 valve closed
12/8/2011	4:56:14 PM	SiCl4 pre valve closed
12/8/2011	4:56:14 PM	SiCl4 post valve closed
12/8/2011	4:56:14 PM	Main Vac valve closed
12/8/2011	4:56:14 PM	Bubbler valve closed
12/8/2011	4:56:14 PM	Bypass valve opened
12/8/2011	4:56:14 PM	Helium MFC set to  0.000000
12/8/2011	4:56:14 PM	H2 MFC set to  0.000000
12/8/2011	4:56:14 PM	BCl3 MFC set to  0.000000
12/8/2011	4:56:14 PM	PHl3 MFC set to  0.000000
12/8/2011	4:56:14 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:56:14 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:56:15 PM	Tube furnace set to 0
12/8/2011	4:56:44 PM	Helium valve closed
12/8/2011	4:56:44 PM	H2 valve closed
12/8/2011	4:56:44 PM	BCl3 valve closed
12/8/2011	4:56:44 PM	PH3 valve closed
12/8/2011	4:56:44 PM	SiCl4 pre valve closed
12/8/2011	4:56:44 PM	SiCl4 post valve closed
12/8/2011	4:56:44 PM	Bypass valve closed
12/8/2011	4:56:44 PM	Bubbler valve closed
12/8/2011	4:56:44 PM	Main Vac valve opened
12/8/2011	4:56:44 PM	Helium MFC set to  0.000000
12/8/2011	4:56:44 PM	H2 MFC set to  0.000000
12/8/2011	4:56:44 PM	BCl3 MFC set to  0.000000
12/8/2011	4:56:44 PM	PHl3 MFC set to  0.000000
12/8/2011	4:56:44 PM	SiCl4 MFC set to  0.000000
12/8/2011	4:56:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	4:56:45 PM	Tube furnace set to 0
12/8/2011	4:56:46 PM	Run finished at 4:56 PM
12/8/2011	4:56:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2011	4:57:35 PM	Helium MFC set to  20.000000
12/8/2011	4:57:36 PM	Helium valve opened
12/8/2011	4:57:41 PM	Helium valve closed
12/8/2011	5:04:18 PM	Recipe started at 5:04 PM
12/8/2011	5:04:18 PM	Helium valve closed
12/8/2011	5:04:18 PM	H2 valve closed
12/8/2011	5:04:18 PM	BCl3 valve closed
12/8/2011	5:04:18 PM	PH3 valve closed
12/8/2011	5:04:18 PM	SiCl4 pre valve closed
12/8/2011	5:04:18 PM	SiCl4 post valve closed
12/8/2011	5:04:18 PM	Bypass valve closed
12/8/2011	5:04:18 PM	Bubbler valve closed
12/8/2011	5:04:18 PM	Main Vac valve opened
12/8/2011	5:04:18 PM	Helium MFC set to  0.000000
12/8/2011	5:04:18 PM	H2 MFC set to  0.000000
12/8/2011	5:04:18 PM	BCl3 MFC set to  0.000000
12/8/2011	5:04:18 PM	PHl3 MFC set to  0.000000
12/8/2011	5:04:18 PM	SiCl4 MFC set to  0.000000
12/8/2011	5:04:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	5:04:19 PM	Tube furnace set to 0
12/8/2011	6:04:19 PM	Helium valve closed
12/8/2011	6:04:19 PM	H2 valve closed
12/8/2011	6:04:19 PM	BCl3 valve closed
12/8/2011	6:04:19 PM	PH3 valve closed
12/8/2011	6:04:19 PM	SiCl4 pre valve closed
12/8/2011	6:04:19 PM	SiCl4 post valve closed
12/8/2011	6:04:19 PM	Main Vac valve closed
12/8/2011	6:04:19 PM	Bypass valve closed
12/8/2011	6:04:19 PM	Bubbler valve closed
12/8/2011	6:04:19 PM	Helium MFC set to  0.000000
12/8/2011	6:04:19 PM	H2 MFC set to  0.000000
12/8/2011	6:04:19 PM	BCl3 MFC set to  0.000000
12/8/2011	6:04:19 PM	PHl3 MFC set to  0.000000
12/8/2011	6:04:19 PM	SiCl4 MFC set to  0.000000
12/8/2011	6:04:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:04:19 PM	Tube furnace set to 0
12/8/2011	6:04:22 PM	Helium valve closed
12/8/2011	6:04:22 PM	BCl3 valve closed
12/8/2011	6:04:22 PM	PH3 valve closed
12/8/2011	6:04:22 PM	SiCl4 pre valve closed
12/8/2011	6:04:22 PM	SiCl4 post valve closed
12/8/2011	6:04:22 PM	Main Vac valve closed
12/8/2011	6:04:22 PM	Bypass valve closed
12/8/2011	6:04:22 PM	Bubbler valve closed
12/8/2011	6:04:22 PM	H2 valve opened
12/8/2011	6:04:22 PM	Helium MFC set to  0.000000
12/8/2011	6:04:22 PM	H2 MFC set to  500.000000
12/8/2011	6:04:22 PM	BCl3 MFC set to  0.000000
12/8/2011	6:04:22 PM	PHl3 MFC set to  0.000000
12/8/2011	6:04:22 PM	SiCl4 MFC set to  0.000000
12/8/2011	6:04:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:04:22 PM	Tube furnace set to 50
12/8/2011	6:05:25 PM	Helium valve closed
12/8/2011	6:05:25 PM	BCl3 valve closed
12/8/2011	6:05:25 PM	PH3 valve closed
12/8/2011	6:05:25 PM	SiCl4 pre valve closed
12/8/2011	6:05:25 PM	SiCl4 post valve closed
12/8/2011	6:05:25 PM	Main Vac valve closed
12/8/2011	6:05:25 PM	Bypass valve closed
12/8/2011	6:05:25 PM	H2 valve opened
12/8/2011	6:05:25 PM	Bubbler valve opened
12/8/2011	6:05:25 PM	Helium MFC set to  0.000000
12/8/2011	6:05:25 PM	H2 MFC set to  500.000000
12/8/2011	6:05:25 PM	BCl3 MFC set to  0.000000
12/8/2011	6:05:25 PM	PHl3 MFC set to  0.000000
12/8/2011	6:05:25 PM	SiCl4 MFC set to  0.000000
12/8/2011	6:05:25 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:05:25 PM	Tube furnace set to 50
12/8/2011	6:05:26 PM	Helium valve closed
12/8/2011	6:05:26 PM	BCl3 valve closed
12/8/2011	6:05:26 PM	PH3 valve closed
12/8/2011	6:05:26 PM	SiCl4 pre valve closed
12/8/2011	6:05:26 PM	SiCl4 post valve closed
12/8/2011	6:05:26 PM	Main Vac valve closed
12/8/2011	6:05:26 PM	Bypass valve closed
12/8/2011	6:05:26 PM	H2 valve opened
12/8/2011	6:05:26 PM	Bubbler valve opened
12/8/2011	6:05:26 PM	Helium MFC set to  0.000000
12/8/2011	6:05:26 PM	H2 MFC set to  500.000000
12/8/2011	6:05:26 PM	BCl3 MFC set to  0.000000
12/8/2011	6:05:26 PM	PHl3 MFC set to  0.000000
12/8/2011	6:05:26 PM	SiCl4 MFC set to  0.000000
12/8/2011	6:05:26 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:05:27 PM	Tube furnace set to 1000
12/8/2011	6:28:27 PM	Helium valve closed
12/8/2011	6:28:27 PM	BCl3 valve closed
12/8/2011	6:28:27 PM	Main Vac valve closed
12/8/2011	6:28:27 PM	Bypass valve closed
12/8/2011	6:28:27 PM	H2 valve opened
12/8/2011	6:28:27 PM	PH3 valve opened
12/8/2011	6:28:27 PM	SiCl4 pre valve opened
12/8/2011	6:28:27 PM	SiCl4 post valve opened
12/8/2011	6:28:27 PM	Bubbler valve opened
12/8/2011	6:28:27 PM	Helium MFC set to  0.000000
12/8/2011	6:28:27 PM	H2 MFC set to  495.000000
12/8/2011	6:28:27 PM	BCl3 MFC set to  0.000000
12/8/2011	6:28:27 PM	PHl3 MFC set to  1.000000
12/8/2011	6:28:27 PM	SiCl4 MFC set to  30.000000
12/8/2011	6:28:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:28:27 PM	Tube furnace set to 1000
12/8/2011	6:48:27 PM	Helium valve closed
12/8/2011	6:48:27 PM	BCl3 valve closed
12/8/2011	6:48:27 PM	PH3 valve closed
12/8/2011	6:48:27 PM	SiCl4 pre valve closed
12/8/2011	6:48:27 PM	SiCl4 post valve closed
12/8/2011	6:48:27 PM	Main Vac valve closed
12/8/2011	6:48:27 PM	Bypass valve closed
12/8/2011	6:48:27 PM	H2 valve opened
12/8/2011	6:48:27 PM	Bubbler valve opened
12/8/2011	6:48:27 PM	Helium MFC set to  0.000000
12/8/2011	6:48:27 PM	H2 MFC set to  480.000000
12/8/2011	6:48:27 PM	BCl3 MFC set to  0.000000
12/8/2011	6:48:27 PM	PHl3 MFC set to  0.000000
12/8/2011	6:48:27 PM	SiCl4 MFC set to  0.000000
12/8/2011	6:48:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:48:27 PM	Tube furnace set to 750
12/8/2011	6:58:27 PM	H2 valve closed
12/8/2011	6:58:27 PM	BCl3 valve closed
12/8/2011	6:58:27 PM	PH3 valve closed
12/8/2011	6:58:27 PM	SiCl4 pre valve closed
12/8/2011	6:58:27 PM	SiCl4 post valve closed
12/8/2011	6:58:27 PM	Main Vac valve closed
12/8/2011	6:58:27 PM	Bypass valve closed
12/8/2011	6:58:27 PM	Helium valve opened
12/8/2011	6:58:27 PM	Bubbler valve opened
12/8/2011	6:58:27 PM	Helium MFC set to  400.000000
12/8/2011	6:58:27 PM	H2 MFC set to  0.000000
12/8/2011	6:58:27 PM	BCl3 MFC set to  0.000000
12/8/2011	6:58:27 PM	PHl3 MFC set to  0.000000
12/8/2011	6:58:27 PM	SiCl4 MFC set to  0.000000
12/8/2011	6:58:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	6:58:27 PM	Tube furnace set to 0
12/8/2011	7:23:27 PM	Helium valve closed
12/8/2011	7:23:27 PM	H2 valve closed
12/8/2011	7:23:27 PM	BCl3 valve closed
12/8/2011	7:23:27 PM	PH3 valve closed
12/8/2011	7:23:27 PM	SiCl4 pre valve closed
12/8/2011	7:23:27 PM	SiCl4 post valve closed
12/8/2011	7:23:27 PM	Main Vac valve closed
12/8/2011	7:23:27 PM	Bypass valve closed
12/8/2011	7:23:27 PM	Bubbler valve closed
12/8/2011	7:23:27 PM	Helium MFC set to  0.000000
12/8/2011	7:23:27 PM	H2 MFC set to  0.000000
12/8/2011	7:23:27 PM	BCl3 MFC set to  0.000000
12/8/2011	7:23:27 PM	PHl3 MFC set to  0.000000
12/8/2011	7:23:27 PM	SiCl4 MFC set to  0.000000
12/8/2011	7:23:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	7:23:27 PM	Tube furnace set to 50
12/8/2011	7:28:27 PM	Helium valve closed
12/8/2011	7:28:27 PM	H2 valve closed
12/8/2011	7:28:27 PM	BCl3 valve closed
12/8/2011	7:28:27 PM	PH3 valve closed
12/8/2011	7:28:27 PM	SiCl4 pre valve closed
12/8/2011	7:28:27 PM	SiCl4 post valve closed
12/8/2011	7:28:27 PM	Main Vac valve closed
12/8/2011	7:28:27 PM	Bubbler valve closed
12/8/2011	7:28:27 PM	Bypass valve opened
12/8/2011	7:28:27 PM	Helium MFC set to  0.000000
12/8/2011	7:28:27 PM	H2 MFC set to  0.000000
12/8/2011	7:28:27 PM	BCl3 MFC set to  0.000000
12/8/2011	7:28:27 PM	PHl3 MFC set to  0.000000
12/8/2011	7:28:27 PM	SiCl4 MFC set to  0.000000
12/8/2011	7:28:27 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	7:28:27 PM	Tube furnace set to 0
12/8/2011	7:33:27 PM	Helium valve closed
12/8/2011	7:33:27 PM	H2 valve closed
12/8/2011	7:33:27 PM	BCl3 valve closed
12/8/2011	7:33:27 PM	PH3 valve closed
12/8/2011	7:33:27 PM	SiCl4 pre valve closed
12/8/2011	7:33:27 PM	SiCl4 post valve closed
12/8/2011	7:33:27 PM	Bypass valve closed
12/8/2011	7:33:27 PM	Bubbler valve closed
12/8/2011	7:33:27 PM	Main Vac valve opened
12/8/2011	7:33:27 PM	Helium MFC set to  0.000000
12/8/2011	7:33:27 PM	H2 MFC set to  0.000000
12/8/2011	7:33:27 PM	BCl3 MFC set to  0.000000
12/8/2011	7:33:28 PM	PHl3 MFC set to  0.000000
12/8/2011	7:33:28 PM	SiCl4 MFC set to  0.000000
12/8/2011	7:33:28 PM	Bypass solenoid MFC set to  0.000000
12/8/2011	7:33:28 PM	Tube furnace set to 0
12/8/2011	7:33:29 PM	Run finished at 7:33 PM
